CaseList

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Process Issues and Defects

Hybrid Silicon Process Modules
Process Step Issue or Defect Link
Initial wafer check      
Dice and cleave      
SOI waveguide definition      
SOI grating definition      
SOI actives definition      
Vertical channel definition      
Protection layer definition      
Quantum well intermixing      
Wafer bonding      
Gap fill      
P-mesa definition      
Lower SCH definition      
N-InP definition      
N-metal definition      
P-metal definition      
Ion implantation      
Via definition      
Probe metal      
Remove III/V in gap      
Dice and polish      
Initial standard wafer testing      
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