CaseList
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Process Issues and Defects
Hybrid Silicon Process Modules
Process Step
Issue or Defect
Link
Initial wafer check
Dice and cleave
SOI waveguide definition
SOI grating definition
SOI actives definition
Vertical channel definition
Protection layer definition
Quantum well intermixing
Wafer bonding
Gap fill
P-mesa definition
Lower SCH definition
N-InP definition
N-metal definition
P-metal definition
Ion implantation
Via definition
Probe metal
Remove III/V in gap
Dice and polish
Initial standard wafer testing
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