Mask Order

I-Line Stepper Masks (GCA Stepper and GCA Autostepper)

Some things you might need to know

• UCSB standard stepper frame
  • Important! Read the instructions before you start.
  • This Ledit file includes frames for 1, 2 and 4 fields on a single plate. You do not need to place each layer in this file, but it will be a good visual display for each layer when you try to put in coordinates for each layer.
• Mask vendor: Photronics. Please contact Grace Law (glaw@photronics.com) for mask order.
• Specification of the masks.

Necessary files for mask order

• GDS file for each layer
• Instructions for the placement and coordinates for each layer on the mask plate (example)
  • You can specify spec. of the mask, position of each layer, and polarity here.
    • A note on polarity: If a layer is specified as "negative," what you have digitized is clear on the mask. If the layer is "positive," what you have digitized would be dark on the mask.
• Mask order form (example)

DUV Stepper Masks

Please start by going through these slides

The DUV Stepper alignment mark may be something you put on i-line stepper masks if you plan to do pieces.

TOPPAN is our vendor for DUV Stepper masks. Use this order form based on this quote's "product code" (do not share this quote with other vendors). Here's a PO template.

Frame is 22x27.4mm(X,Y) and you do not rotate the mask. High resolution items should be inside the 21x21. You don't have to add all of the ASML patterns and frame, they will put the frame on. However, to get an idea here's a copy of the frame marks (Nanofab setup mask also includes these marks and barcode location, etc.). For more information reference this manual.