DUV Stepper

Characterization

Process Follower Google Doc

Presentations

Current

DUV Stepper Waveguides: Media:DUV Stepper Waveguides_v4.pptx

Backups

DUV Stepper Waveguides Backup: Media:DUV Stepper Waveguides_v3.pptx
DUV Stepper Waveguides Backup: Media:DUV Stepper Waveguides_v2.pptx
DUV Stepper Waveguides Backup: Media:DUV Stepper Waveguides_v1.pptx

Pictures

160C Bake

DUV Si 160C_0 SEMs - Gasonics x3 - Dies 26-29: File:160c 8 6 12.zip
DUV Si 160C_0 Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip

170C Bake

DUV Si 170C_0 SEMs - Gasonics x3 - Dies 24-27: File:170c 8 4 12.zip
DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': File:DUV-si-170C-1.zip
DUV Si 170C_2 Pic - Flood DUV pre-etch + AZ300MIF post-etch: Media:DUV_si_170C_2.jpg
DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': File:8 23 DUV SOI 170C 1.zip

180C Bake

DUV Si 180C_0: SEMs - Gasonics x3 - Dies 19-28: File:180c 8 4 12.zip
DUV Si 180C_0: SEMs - Gasonics x3 - Dies 25-29: File:180c 8 6 12.zip

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