UCSB E-Phi Runs

Planned runs for UCSB - E-Phi

Component test runs

UCSB-E-Phi-dev-1

SOI only: test litho and bonding uniformity
Planning:

• 12/14 ideas due;
• 01/11 mask review;
• 01/12 mask order sent out;
• 01/21 - 01/30 fabrication.

Components and structures

Media:UCSB-E-Phi-dev-1_SOI_mask_details.pptx

UCSB-E-Phi-dev-2

III/V lasers and SOAs on SOI;
Planning:

• 2.17.2012 Concepts for SOA spin due
• 3.02.2012 Fleshed-out designs for mask inclusion
• 3.16.2012 Designs ready for review (i.e. gds files)
• 3.30.2012 Mask tapeout deadline
• 4.15.2012 Processing begins

UCSB-E-Phi-dev-1DUV

SOI only: test litho and novel structures
Planning:

• 04/30 ideas due
• 05/04 mask review
• 05/07 mask order sent out
• 05/10 - 05/24 fabrication

UCSB-E-Phi-dev-3

SOI passives coupled to ULLWs;

UCSB-E-Phi-dev-4

EDWA test run;

UCSB-E-Phi-dev-5

Isolator test run;

Shuttle runs

UCSB-E-Phi-1

III/V gain on SOI;

• 03/15 mask design finished;
• 04/31 fabrication finished;

UCSB-E-Phi-2

III/V gain and ULLWs on SOI;

UCSB-E-Phi-3

to be decided: either isolators or EDWAs on a III/V on SOI platform.