Difference between revisions of "SWEEPER"
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== Processing == | == Processing == | ||
| − | '''Current Traveler for ACTIVES Run 3 - Phase modulator run can be found here: | + | '''RUN 3.1 (active Silicon only for fast phase modulator tests)'''<br> |
| + | Current Traveler for ACTIVES Run 3 - Phase modulator run can be found here: [[Media:SWEEPER Actives Trav v21_2 ACTIVE SI ONLY.docx]]<br> | ||
| + | Old Traveler for ACTIVES Run 3 - Phase modulator run can be found here: [[Media:SWEEPER Actives Trav v21_1 ACTIVE SI ONLY.docx]]<br> | ||
| − | + | Planned schedule for ACTIVES Run 3 - Phase modulator run can be found here: [https://docs.google.com/spreadsheet/ccc?key=0Aj-K6MNgH5hRdEt0U0lrOFpXUGVmYTNhRlhZVXVZQnc#gid=0 aSi-PM Process Schedule] | |
| − | + | Mask set is visible here (currently Rib layer only): [[Media:AAA_aSi_RIBLAYER.cif]] <br><br> | |
| − | + | Chip status is maintained on a google doc: [https://docs.google.com/spreadsheet/pub?hl=en_US&hl=en_US&key=0AslEbZ1yEnOHdGstd240eHJKMGhCSFZuN3F0TjVxNnc&output=html Google doc traveller] | |
| − | ''' | + | Current Anneal Recipes for ACTIVES Run 1:: [[Media:Sweeper_Anneal_Recipe.xlsx]] |
| + | <br><br> | ||
| + | '''RUN 2.3 (hybrid Silicon only for Phase 1 tunable lasers test)'''<br> | ||
| + | Traveler used for ACTIVES Run 1A (hybrid silicon only - no active silicon): [[Media:SWEEPER Actives Trav vH20_2_HYBRID-ONLY.docx]] | ||
| − | ''' | + | '''RUN 2.2 (both active and hybrid Silicon for Phase 1 PIC)'''<br> |
| + | Traveler used for ACTIVES Run 1 (full process, chips A-E, produced chips A2, E1, E2): [[Media:SWEEPER Actives Trav v20_1.docx]] | ||
| + | '''RUN 2.1 (active Silicon for Phase 1 intermediate testing)'''<br> | ||
| + | Prior traveler for ACTIVES Run 1 (active Si only): [[Media:SWEEPER Actives Trav v15_3.xls]] | ||
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| − | ''' | + | '''RUN 1.2(spring/summer 2011 - passive SWEEPER for Phase 1 with revisions to avoid grating damage)'''<br> |
| + | Traveler for Run 2B: [[Media:110202 Sweeper Rev1.1 Run 2B.xls]] | ||
| + | '''RUN 1.1(early spring 2011 - passive SWEEPER for Phase 1)''' <br> | ||
| + | Traveler for Run 1: [[Media:110202_Sweeper_Rev1_Batch_1.xls]] | ||
| − | + | Prelim mask: | |
| − | + | [[File:SWEEPER_ACTIVES55_semifinal_flat2.cif]] | |
| − | + | [[File:SWEEPER_ACTIVES59_semifinal_flat2.cif]] | |
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Grating Reports: | Grating Reports: | ||
[[Media:Sweeper_Run_2B_-_GratingReport-2.pptx]] | [[Media:Sweeper_Run_2B_-_GratingReport-2.pptx]] | ||
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== Characterization == | == Characterization == | ||
Revision as of 10:27, 24 July 2012
Overview
SWEEPER, formally known as "Chip-scale Integrated Photonic Phased Array" (CHIPPA) aims to produce a phased array of waveguide-coupled surface gratings integrated with an on-chip tunable laser, amplifiers, and phase modulators for free-space beam control in 2 axes.
Powerpoint overview can be found here Media:SWEEPER_process_flow.pptx
Simulations
Run 2 current injection modulator:
Processing
RUN 3.1 (active Silicon only for fast phase modulator tests)
Current Traveler for ACTIVES Run 3 - Phase modulator run can be found here: Media:SWEEPER Actives Trav v21_2 ACTIVE SI ONLY.docx
Old Traveler for ACTIVES Run 3 - Phase modulator run can be found here: Media:SWEEPER Actives Trav v21_1 ACTIVE SI ONLY.docx
Planned schedule for ACTIVES Run 3 - Phase modulator run can be found here: aSi-PM Process Schedule
Mask set is visible here (currently Rib layer only): Media:AAA_aSi_RIBLAYER.cif
Chip status is maintained on a google doc: Google doc traveller
Current Anneal Recipes for ACTIVES Run 1:: Media:Sweeper_Anneal_Recipe.xlsx
RUN 2.3 (hybrid Silicon only for Phase 1 tunable lasers test)
Traveler used for ACTIVES Run 1A (hybrid silicon only - no active silicon): Media:SWEEPER Actives Trav vH20_2_HYBRID-ONLY.docx
RUN 2.2 (both active and hybrid Silicon for Phase 1 PIC)
Traveler used for ACTIVES Run 1 (full process, chips A-E, produced chips A2, E1, E2): Media:SWEEPER Actives Trav v20_1.docx
RUN 2.1 (active Silicon for Phase 1 intermediate testing)
Prior traveler for ACTIVES Run 1 (active Si only): Media:SWEEPER Actives Trav v15_3.xls
RUN 1.2(spring/summer 2011 - passive SWEEPER for Phase 1 with revisions to avoid grating damage)
Traveler for Run 2B: Media:110202 Sweeper Rev1.1 Run 2B.xls
RUN 1.1(early spring 2011 - passive SWEEPER for Phase 1)
Traveler for Run 1: Media:110202_Sweeper_Rev1_Batch_1.xls
Prelim mask:
File:SWEEPER ACTIVES55 semifinal flat2.cif
File:SWEEPER ACTIVES59 semifinal flat2.cif
Grating Reports:
Media:Sweeper_Run_2B_-_GratingReport-2.pptx
Characterization
aSI PHASE MODULATOR RUN
Group A
Rib litho pics before hard mask etch: File:Rib litho pics.zip
Rib Pics before Si Etch - Dummy 1: File:Dummy post pr strip pre rib etch.zip
Rib Pics before Si Etch - Sample 1: File:Sample1 pre si etch.zip
Rib Pics before Si Etch - Sample 2: File:Sample2 pre si etch.zip
Rib Pics post Si Etch - Sample 2: File:Sample2 post si etch.zip
Group B
SEM post Si Etch - Dummy 2: File:Sample2 SEM post si etch.zip
PASSIVES RUN
Passive grating results: File:Sweeper Q2.doc
2D beam steering results, OFC video: File:OFC Doylend vid2.zip
