Difference between revisions of "SOI waveguide definition"
From OptoelectronicsWiki
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==Suggestions for modified process== | ==Suggestions for modified process== | ||
[[media:Silicon processing.pptx|10282011_HSP]] | [[media:Silicon processing.pptx|10282011_HSP]] | ||
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[[media:Silicon processing01.pptx|12022011_HSP]] | [[media:Silicon processing01.pptx|12022011_HSP]] | ||
Revision as of 09:28, 2 December 2011
Back to Process_Hybrid_Silicon.
Current Processes
Single etch depth
Process follower - Si WG etch
Process flow - Si WG etch
