Difference between revisions of "SWEEPER"
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Rib Pics before Si Etch - Sample 2: [[File:sample2_pre_si_etch.zip]] | Rib Pics before Si Etch - Sample 2: [[File:sample2_pre_si_etch.zip]] | ||
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Revision as of 13:32, 18 July 2012
Overview
SWEEPER, formally known as "Chip-scale Integrated Photonic Phased Array" (CHIPPA) aims to produce a phased array of waveguide-coupled surface gratings integrated with an on-chip tunable laser, amplifiers, and phase modulators for free-space beam control in 2 axes.
Powerpoint overview can be found here Media:SWEEPER_process_flow.pptx
Simulations
Run 2 current injection modulator:
Processing
Current Traveler for ACTIVES Run 3 - Phase modulator run can be found here: Media:SWEEPER Actives Trav v21_0 ACTIVE SI ONLY.docx
Planned schedule for ACTIVES Run 3 - Phase modulator run can be found here: aSi-PM Process Schedule
Mask set is visible here (currently Rib layer only): Media:AAA_aSi_RIBLAYER.cif
Chip status is maintained on a google doc visible here: Google doc traveller
Current Anneal Recipes for ACTIVES Run 1 can be found here: Media:Sweeper_Anneal_Recipe.xlsx
Traveler used for ACTIVES Run 1 (full process, chips A-E, produced chips A2, E1, E2 can be found here: Media:SWEEPER Actives Trav v20_1.docx
Traveler used for ACTIVES Run 1A (hybrid silicon only - no active silicon) can be found here: Media:SWEEPER Actives Trav vH20_2_HYBRID-ONLY.docx
Prior traveler for ACTIVES Run 1 can be found here: Media:SWEEPER Actives Trav v20_0.docx
Prior traveler for ACTIVES Run 1 (active Si only) can be found here: Media:SWEEPER Actives Trav v15_3.xls
PASSIVES RUN (spring/summer 2011):
Traveler for Run 1 can be found here Media:110202_Sweeper_Rev1_Batch_1.xls
Traveler for Run 2B can be found here Media:110202 Sweeper Rev1.1 Run 2B.xls
Grating Reports:
Media:Sweeper_Run_2B_-_GratingReport-2.pptx
Prelim mask:
File:SWEEPER ACTIVES55 semifinal flat2.cif
File:SWEEPER ACTIVES59 semifinal flat2.cif
Characterization
aSI PHASE MODULATOR RUN
Rib litho pics before hard mask etch: File:Rib litho pics.zip
Rib Pics before Si Etch - Dummy Sample: File:Dummy post pr strip pre rib etch.zip
Rib Pics before Si Etch - Sample 1: File:Sample1 pre si etch.zip
Rib Pics before Si Etch - Sample 2: File:Sample2 pre si etch.zip
Rib Pics post Si Etch - Sample 2: File:Sample2 post si etch.zip
PASSIVES RUN
Passive grating results: File:Sweeper Q2.doc
2D beam steering results, OFC video: File:OFC Doylend vid2.zip
