Difference between revisions of "DUV Stepper"
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Jaredhulme (Talk | contribs) (→170C Bake) |
Jaredhulme (Talk | contribs) (→170C Bake) |
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DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': [[File:DUV-si-170C-1.zip]] | DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': [[File:DUV-si-170C-1.zip]] | ||
DUV Si 170C_2 Pic - Flood DUV pre-etch + AZ300MIF post-etch: [[Media:DUV_si_170C_2.jpg]] | DUV Si 170C_2 Pic - Flood DUV pre-etch + AZ300MIF post-etch: [[Media:DUV_si_170C_2.jpg]] | ||
| − | DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': | + | DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': [[File:8_23_DUV SOI 170C_1.zip]] |
| − | + | [[File:8_28_DUV SOI 170C_1.zip]] | |
| − | + | ||
====180C Bake==== | ====180C Bake==== | ||
Revision as of 10:39, 28 August 2012
Contents
Characterization
Process Follower Google Doc
Presentations
Current
DUV Stepper Waveguides: Media:DUV Stepper Waveguides_v4.pptx
Backups
DUV Stepper Waveguides Backup: Media:DUV Stepper Waveguides_v3.pptx DUV Stepper Waveguides Backup: Media:DUV Stepper Waveguides_v2.pptx DUV Stepper Waveguides Backup: Media:DUV Stepper Waveguides_v1.pptx
Pictures
160C Bake
DUV Si 160C_0 SEMs - Gasonics x3 - Dies 26-29: File:160c 8 6 12.zip DUV Si 160C_0 Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
DUV Si 170C_0 SEMs - Gasonics x3 - Dies 24-27: File:170c 8 4 12.zip DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': File:DUV-si-170C-1.zip DUV Si 170C_2 Pic - Flood DUV pre-etch + AZ300MIF post-etch: Media:DUV_si_170C_2.jpg DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': File:8 23 DUV SOI 170C 1.zip File:8 28 DUV SOI 170C 1.zip
180C Bake
DUV Si 180C_0: SEMs - Gasonics x3 - Dies 19-28: File:180c 8 4 12.zip DUV Si 180C_0: SEMs - Gasonics x3 - Dies 25-29: File:180c 8 6 12.zip
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