SWEEPER

Overview

SWEEPER, formally known as "Chip-scale Integrated Photonic Phased Array" (CHIPPA) aims to produce a phased array of waveguide-coupled surface gratings integrated with an on-chip tunable laser, amplifiers, and phase modulators for free-space beam control in 2 axes.

Powerpoint overview can be found here Media:SWEEPER_process_flow.pptx

Simulations

Run 2 current injection modulator:

Processing

Current Traveler for ACTIVES Run 3 - Phase modulator run can be found here: Media:SWEEPER Actives Trav v21_0 ACTIVE SI ONLY.docx

Mask set is visible here (currently Rib layer only): Media:AAA_aSi_RIBLAYER.cif‎

Chip status is maintained on a google doc visible here: Google doc traveller

Current Anneal Recipes for ACTIVES Run 1 can be found here: Media:Sweeper_Anneal_Recipe.xlsx‎

Traveler used for ACTIVES Run 1 (full process, chips A-E, produced chips A2, E1, E2 can be found here: Media:SWEEPER Actives Trav v20_1.docx

Traveler used for ACTIVES Run 1A (hybrid silicon only - no active silicon) can be found here: Media:SWEEPER Actives Trav vH20_2_HYBRID-ONLY.docx

Prior traveler for ACTIVES Run 1 can be found here: Media:SWEEPER Actives Trav v20_0.docx

Prior traveler for ACTIVES Run 1 (active Si only) can be found here: Media:SWEEPER Actives Trav v15_3.xls

PASSIVES RUN (spring/summer 2011):

Traveler for Run 1 can be found here Media:110202_Sweeper_Rev1_Batch_1.xls

Traveler for Run 2B can be found here Media:110202 Sweeper Rev1.1 Run 2B.xls

Grating Reports:

Media:Sweeper_Run_2B_-_GratingReport-2.pptx

Prelim mask:

File:SWEEPER ACTIVES55 semifinal flat2.cif

File:SWEEPER ACTIVES59 semifinal flat2.cif

Characterization

aSI PHASE MODULATOR RUN
Rib litho pics before hard mask etch: Media:rib litho pics.zip

PASSIVES RUN
Passive grating results: Media:sweeper_Q2.doc
2D beam steering results, OFC video: File:OFC Doylend vid2.zip