Difference between revisions of "SWEEPER"
Jaredhulme (Talk | contribs) (→Characterization) |
Jaredhulme (Talk | contribs) (→Characterization) |
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'''Run 1''' | '''Run 1''' | ||
− | Step | + | Step - Description - Sample Names - File |
− | 3.3 - Rib litho pics before hard mask etch: [[File:rib litho pics.zip]] | + | 3.3 - Rib litho pics before hard mask etch: [[File:rib litho pics.zip]] |
− | 3.4 - Rib Pics before Si Etch - Dummy 1: [[File:dummy_post_pr_strip_pre_rib_etch.zip]] | + | 3.4 - Rib Pics before Si Etch - Dummy 1 : [[File:dummy_post_pr_strip_pre_rib_etch.zip]] |
− | 3.4 - Rib Pics before Si Etch - Sample 1: [[File:sample1_pre_si_etch.zip]] | + | 3.4 - Rib Pics before Si Etch - Sample 1: [[File:sample1_pre_si_etch.zip]] |
− | 3.4 - Rib Pics before Si Etch - Sample 2: [[File:sample2_pre_si_etch.zip]] | + | 3.4 - Rib Pics before Si Etch - Sample 2: [[File:sample2_pre_si_etch.zip]] |
− | 3.5 - Rib Pics post Si Etch - Sample 2: [[File:sample2_post_si_etch.zip]] | + | 3.5 - Rib Pics post Si Etch - Sample 2: [[File:sample2_post_si_etch.zip]] |
'''Run 2''' | '''Run 2''' | ||
− | Step | + | Step - Description - Sample Names - File |
− | 3.5 - SEM post Si Etch - Dummy 2: | + | 3.5 - SEM post Si Etch - Dummy 2: [[File:Dummy2_SEM_post_si_etch.zip]] |
− | N-Dope Litho | + | 4.4 - N-Dope Litho (Implant 3A) - Sample 3 & 4: [[File:ndopelithopics.zip]] |
− | Post Implant 3A PR Strip | + | 4.5 - Post Implant 3A PR Strip - Sample 3 & 4: [[File:post_imp3A_PR_strip.zip]] |
− | P- | + | 5.3 - P-Dope1 Litho (Implant 3B) - Sample 3 & 4: [[File:implant3B_litho.zip]] |
− | Post Implant 3B PR Strip: [[Media:post_imp3B_PR_strip.jpg]] | + | 5.4 - Post Implant 3B PR Strip: [[Media:post_imp3B_PR_strip.jpg]] |
− | P- | + | 6.3 - P-Dope2 Litho (Implant 3C) - Sample 3 & 4: [[File:implant3C_litho.zip]] |
− | Post Implant 3C PR Strip | + | 6.4 - Post Implant 3C PR Partial Strip - S3_Dies 1,2: [[File:Cracking_Pics_post_3C_Strip_1.jpg]] |
− | Post 1050C Anneal: [[File:post_1050C_anneal_pics.zip]] | + | 7.1 - Post 1050C Anneal (S3 and Dum2 taken to unknown temp): [[File:post_1050C_anneal_pics.zip]] |
− | Via 1 Litho | + | 9.2 - Via 1 Litho - Dum2, S3, S4: [[File:Via_1_litho_pics.zip]] |
− | Via 1 Etched - PR Stripped: [[File:Via1_Etch_PR_Stripped.zip]] | + | 9.4 - Via 1 Etched - PR Stripped: [[File:Via1_Etch_PR_Stripped.zip]] |
<u><b>PASSIVES RUN</b></u> <br> | <u><b>PASSIVES RUN</b></u> <br> | ||
Passive grating results: [[File:sweeper_Q2.doc]] <br> | Passive grating results: [[File:sweeper_Q2.doc]] <br> | ||
2D beam steering results, OFC video: [[File:OFC_Doylend_vid2.zip]] | 2D beam steering results, OFC video: [[File:OFC_Doylend_vid2.zip]] |
Revision as of 09:45, 14 August 2012
Overview
SWEEPER, formally known as "Chip-scale Integrated Photonic Phased Array" (CHIPPA) aims to produce a phased array of waveguide-coupled surface gratings integrated with an on-chip tunable laser, amplifiers, and phase modulators for free-space beam control in 2 axes.
Simulations
Run 2 current injection modulator:
Processing
RUN 3.1 (active Silicon only for fast phase modulator tests)
Current Traveler for ACTIVES Run 3 - Phase modulator run: Media:SWEEPER Actives Trav v21_2b ACTIVE SI ONLY.docx <-- note the new dopant anneal recipe: 5mins instead of 10.
Old Traveler for ACTIVES Run 3 - Phase modulator run: Media:SWEEPER Actives Trav v21_1 ACTIVE SI ONLY.docx
Powerpoint overview (trav 21_2): Media:process flow SWEEPER RUN3_1 trav v21_2.pptx
Planned schedule for ACTIVES Run 3 - Phase modulator run: aSi-PM Process Schedule
Mask set: Media:SWEEPER 3_1 - aSi Shortloop v12.zip
Chip status is maintained on a google doc: Google doc traveller
Current Anneal Recipes for ACTIVES Run 1:: Media:Sweeper_Anneal_Recipe.xlsx
RUN 2.3 (hybrid Silicon only for Phase 1 tunable lasers test)
Traveler used for ACTIVES Run 1A (hybrid silicon only - no active silicon): Media:SWEEPER Actives Trav vH20_2_HYBRID-ONLY.docx
RUN 2.2 (both active and hybrid Silicon for Phase 1 PIC)
Traveler used for ACTIVES Run 1 (full process, chips A-E, produced chips A2, E1, E2): Media:SWEEPER Actives Trav v20_1.docx
RUN 2.1 (active Silicon for Phase 1 intermediate testing)
Prior traveler for ACTIVES Run 1 (active Si only): Media:SWEEPER Actives Trav v15_3.xls
RUN 1.2(spring/summer 2011 - passive SWEEPER for Phase 1 with revisions to avoid grating damage)
Traveler for Run 2B: Media:110202 Sweeper Rev1.1 Run 2B.xls
RUN 1.1(early spring 2011 - passive SWEEPER for Phase 1)
Traveler for Run 1: Media:110202_Sweeper_Rev1_Batch_1.xls
Powerpoint overview can be found here Media:SWEEPER_process_flow.pptx
Prelim mask:
File:SWEEPER ACTIVES55 semifinal flat2.cif
File:SWEEPER ACTIVES59 semifinal flat2.cif
Grating Reports:
Media:Sweeper_Run_2B_-_GratingReport-2.pptx
Characterization
aSI PHASE MODULATOR RUN
Run 1
Step - Description - Sample Names - File
3.3 - Rib litho pics before hard mask etch: File:Rib litho pics.zip
3.4 - Rib Pics before Si Etch - Dummy 1 : File:Dummy post pr strip pre rib etch.zip
3.4 - Rib Pics before Si Etch - Sample 1: File:Sample1 pre si etch.zip
3.4 - Rib Pics before Si Etch - Sample 2: File:Sample2 pre si etch.zip
3.5 - Rib Pics post Si Etch - Sample 2: File:Sample2 post si etch.zip
Run 2
Step - Description - Sample Names - File
3.5 - SEM post Si Etch - Dummy 2: File:Dummy2 SEM post si etch.zip
4.4 - N-Dope Litho (Implant 3A) - Sample 3 & 4: File:Ndopelithopics.zip
4.5 - Post Implant 3A PR Strip - Sample 3 & 4: File:Post imp3A PR strip.zip
5.3 - P-Dope1 Litho (Implant 3B) - Sample 3 & 4: File:Implant3B litho.zip
5.4 - Post Implant 3B PR Strip: Media:post_imp3B_PR_strip.jpg
6.3 - P-Dope2 Litho (Implant 3C) - Sample 3 & 4: File:Implant3C litho.zip
6.4 - Post Implant 3C PR Partial Strip - S3_Dies 1,2: File:Cracking Pics post 3C Strip 1.jpg
7.1 - Post 1050C Anneal (S3 and Dum2 taken to unknown temp): File:Post 1050C anneal pics.zip
9.2 - Via 1 Litho - Dum2, S3, S4: File:Via 1 litho pics.zip
9.4 - Via 1 Etched - PR Stripped: File:Via1 Etch PR Stripped.zip
PASSIVES RUN
Passive grating results: File:Sweeper Q2.doc
2D beam steering results, OFC video: File:OFC Doylend vid2.zip