AWG receiver

The AWG receiver was a 20 channel AWG with 20 HSP photodiodes on Si nanowires (220nm height).

Processing

Bonding defects

Quantum well lithography misalignment

Mesa lithography misalignment

Wet etch difficulties

Data

AWG pre-bond spectra

Photodetector IV curves

AWG post-bond spectra (measured with on-chip PDs)