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(newest | oldest) View (newer 50 | older 50) (20 | 50 | 100 | 250 | 500)- 18:03, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:PostVia2LithoCracking.zip"
- 17:57, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:Post Via2 Etch Strip Stringers.zip"
- 17:54, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:ToMetLitho.zip"
- 17:48, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:Via Blanket Etch Dektaks.zip"
- 15:59, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:J badPRspin.jpg"
- 15:58, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:QWetch.zip"
- 15:56, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:PMEtch.zip"
- 15:54, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:SW4 1 MesaEtch Rie2Traces.zip"
- 15:49, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:Via1Litho K R1C1.zip"
- 13:07, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:NInP Etch K 1.png"
- 13:06, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:Nmetalliftoff.zip"
- 13:05, 29 January 2013 Jaredhulme (Talk | contribs) uploaded "File:Nmetallithochipi.zip"
- 20:36, 30 November 2012 Jaredhulme (Talk | contribs) uploaded "File:SW4 1 PostBond+100nmOxide Microscopic.zip"
- 20:35, 30 November 2012 Jaredhulme (Talk | contribs) uploaded "File:SW4 1 PostBond+100nmOxide Macroscopic.zip"
- 17:19, 12 November 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV Stepper Waveguides v8a.pptx" (With deep etch SEMs and AFM roughness)
- 11:12, 12 November 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV Stepper Waveguides v8.pptx" (Added Deep Etch photos for SOI wafer Energy 25, Focus -.15.)
- 09:44, 12 November 2012 Jaredhulme (Talk | contribs) uploaded "File:11 9 12 DUV SOI 1 DeepEtch.zip" (SEMs after deep etch for the center die (Energy 25, Focus-.15).)
- 11:56, 24 October 2012 Jaredhulme (Talk | contribs) uploaded "File:ImportFiles.txt" (Uses macros to import a folder of text files into Excel. Files may have as many columns as desired and you can select which ones to import. To use, open Excel. Choose the View menu and click on Macros (at the far right). Choose a name for the mac...)
- 11:51, 15 October 2012 Jaredhulme (Talk | contribs) uploaded a new version of "File:CurrentSweep.txt" (Added comments)
- 11:43, 15 October 2012 Jaredhulme (Talk | contribs) uploaded "File:CurrentSweep.txt" (Sweeps current from a keithley 2400 and records the data in a tab delimited text file.)
- 16:27, 24 September 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV Stepper Waveguides v7.pptx" (Added SEMs of Zig Zag Gratings designed by Mike Davenport (slide 53).)
- 12:39, 11 September 2012 Jaredhulme (Talk | contribs) uploaded "File:9 11duvzigzaggrating.zip"
- 12:20, 10 September 2012 Jaredhulme (Talk | contribs) uploaded "File:Su8removalpostpiranhadip.zip"
- 12:17, 10 September 2012 Jaredhulme (Talk | contribs) uploaded "File:SwabbingSU8 & ProbeMetalLitho.zip"
- 12:07, 10 September 2012 Jaredhulme (Talk | contribs) uploaded "File:9 7postGOstrip.zip"
- 12:07, 10 September 2012 Jaredhulme (Talk | contribs) uploaded "File:2nd PRMetal Layer 9 5 12.zip"
- 09:35, 10 September 2012 Jaredhulme (Talk | contribs) uploaded a new version of "File:DUV Stepper Waveguides v6.pptx" (Added sidewall profiles (slides 48-52), additional pictures for SOI matrix (slides 67-69), and some conclusions (slides 54,77).)
- 09:15, 10 September 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV Stepper Waveguides v6.pptx" (Added sidewall profiles on slides 48-52.)
- 09:12, 10 September 2012 Jaredhulme (Talk | contribs) uploaded "File:9 7 DUV SOI 170 1 Sidewalls.zip" (Sidewall profiles of silicon wafer on best resolution and energy, ie Res = -.15 Energy = 25mJ/cm^2)
- 16:55, 4 September 2012 Jaredhulme (Talk | contribs) uploaded "File:8 31 DUV SOI 170C 1.zip" (More SEMs of the SOI wafer Focus/Energy matrix. )
- 11:36, 28 August 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV Stepper Waveguides v5.pptx"
- 10:46, 28 August 2012 Jaredhulme (Talk | contribs) uploaded "File:8 28 DUV SOI 170C 1.zip" (SOI wafer with matrix array. SEMs are named as E25_F-.15_HGRT, where 'E' stands for the energy in mJ/cm^2 and 'F' for the focus. Energy 25mJ/cm^2, Focus -.15 seems to be a good configuration. )
- 10:20, 23 August 2012 Jaredhulme (Talk | contribs) uploaded "File:8 23 DUV SOI 170C 1.zip" (SOI wafer with matrix array. SEMs are named as E25_F-.15_HGRT, where 'E' stands for the energy in mJ/cm^2 and 'F' for the focus. It appears that the focus needs to be more negative than the current array. More SEMs are needed for conclusive proof.)
- 12:56, 22 August 2012 Jaredhulme (Talk | contribs) uploaded "File:Post5and10minetchsu8.zip" (Looks ok but hard to tell if completely gone. I still need to do the last 30 SiN etch. Measurements over large window was 2.51 um with resist, 2.40 um post 5 min etch (resist gone), 2.38 um post another 5 min etch.)
- 12:52, 22 August 2012 Jaredhulme (Talk | contribs) uploaded "File:Via2Litho.zip" (Notice the rounding at the top of the resist after the 10min 120C bake. )
- 12:45, 22 August 2012 Jaredhulme (Talk | contribs) uploaded "File:NMetal Litho.zip" (Pictures of NMetal litho. Note the shifted alignment (at this and previous layers) on the serpentine waveguides vs the equal alignment on the straight waveguides.)
- 12:39, 22 August 2012 Jaredhulme (Talk | contribs) uploaded "File:Liftoff Results.zip" (The test wafers with metal dep from yesterday ( 0.9 and 1.8 um resist) lifting off this morning with a pipet. Tey were soaked overnight in Acetone and no U/S. Still areas of large flaps but good enough to proceed with the dummy chip. The 0.9 um resist l)
- 10:13, 17 August 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV Stepper Waveguides v4.pptx"
- 10:12, 17 August 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV Stepper Waveguides v3.pptx"
- 10:11, 17 August 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV Stepper Waveguides v2.pptx"
- 10:10, 17 August 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV Stepper Waveguides v1.pptx"
- 08:54, 17 August 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV si 170C 2.jpg" (Microscope picture of the sample. Flood exposed before etch, developed after etch (AZ300MIF))
- 08:50, 17 August 2012 Jaredhulme (Talk | contribs) uploaded "File:DUV-si-170C-1.zip" (SEMs of sample after WG etch and PR strip -PE2 2min, 1165 soak 30min, 1165 U/S (high, freq5, int5) 10 min, PE2 2min)
- 11:54, 15 August 2012 Jaredhulme (Talk | contribs) moved page DUV Lithography Characterization to DUV Stepper
- 12:59, 14 August 2012 Jaredhulme (Talk | contribs) moved page DUV Litho Test Characterization to DUV Lithography Characterization Files
- 12:58, 14 August 2012 Jaredhulme (Talk | contribs) moved page DUV Litho Test Characterization to DUV Lithography Characterization
- 12:51, 14 August 2012 Jaredhulme (Talk | contribs) uploaded "File:160c 8 6 12.zip" (Silicon wafer - DBARC bake temperature 160C)
- 12:50, 14 August 2012 Jaredhulme (Talk | contribs) uploaded "File:180c 8 6 12.zip" (Silicon wafer - DBARC bake temperature 180C)
- 12:48, 14 August 2012 Jaredhulme (Talk | contribs) uploaded "File:180c 8 4 12.zip" (Silicon wafer - DBARC bake temperature 180C)
- 12:48, 14 August 2012 Jaredhulme (Talk | contribs) uploaded "File:170c 8 4 12.zip" (Silicon wafer - DBARC bake temperature 170C)