Difference between revisions of "SOI waveguide definition"

From OptoelectronicsWiki
Jump to: navigation, search
Line 13: Line 13:
  
 
[[media:Silicon processing02.pptx|12092011_HSP]]
 
[[media:Silicon processing02.pptx|12092011_HSP]]
 +
 +
[[media:Silicon processing03.pptx|01132012_HSP]]

Revision as of 08:32, 13 January 2012

Back to Process_Hybrid_Silicon.

Current Processes

Single etch depth

Process follower - Si WG etch

Process flow - Si WG etch

Suggestions for modified process

10282011_HSP

12022011_HSP

12092011_HSP

01132012_HSP