Difference between revisions of "SOI waveguide definition"
From OptoelectronicsWiki
Sudharsanan (Talk | contribs) |
|||
Line 13: | Line 13: | ||
[[media:Silicon processing02.pptx|12092011_HSP]] | [[media:Silicon processing02.pptx|12092011_HSP]] | ||
+ | |||
+ | [[media:Silicon processing03.pptx|01132012_HSP]] |
Revision as of 08:32, 13 January 2012
Back to Process_Hybrid_Silicon.
Current Processes
Single etch depth
Process follower - Si WG etch
Process flow - Si WG etch