Difference between revisions of "SOI waveguide definition"
From OptoelectronicsWiki
Sudharsanan (Talk | contribs) |
Sudharsanan (Talk | contribs) |
||
Line 16: | Line 16: | ||
[[media:Silicon processing03.pptx|01132012_HSP]] | [[media:Silicon processing03.pptx|01132012_HSP]] | ||
− | [[ | + | [[02172012_HSP]] |
Revision as of 08:05, 17 February 2012
Back to Process_Hybrid_Silicon.
Current Processes
Single etch depth
Process follower - Si WG etch
Process flow - Si WG etch