Difference between revisions of "SOI waveguide definition"

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Revision as of 08:05, 17 February 2012

Back to Process_Hybrid_Silicon.

Current Processes

Single etch depth

Process follower - Si WG etch

Process flow - Si WG etch

Suggestions for modified process

10282011_HSP

12022011_HSP

12092011_HSP

01132012_HSP

02172012_HSP