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- 08:54, 29 August 2012 (diff | hist) . . (+1) . . DUV Stepper (→Presentations)
- 08:54, 29 August 2012 (diff | hist) . . (+21) . . DUV Stepper (→Presentations)
- 08:54, 29 August 2012 (diff | hist) . . (-12) . . DUV Stepper (→Presentations)
- 08:53, 29 August 2012 (diff | hist) . . (+2) . . DUV Stepper (→Presentations)
- 08:53, 29 August 2012 (diff | hist) . . (+1) . . DUV Stepper (→Characterization)
- 08:52, 29 August 2012 (diff | hist) . . (-2) . . DUV Stepper (→Presentations)
- 08:52, 29 August 2012 (diff | hist) . . (-292) . . DUV Stepper (→Presentations)
- 08:52, 29 August 2012 (diff | hist) . . (-8) . . DUV Stepper Waveguides Backup Presentations
- 08:51, 29 August 2012 (diff | hist) . . (+35) . . DUV Stepper Waveguides Backup Presentations
- 08:51, 29 August 2012 (diff | hist) . . (+5) . . DUV Stepper Waveguides Backup Presentations
- 08:51, 29 August 2012 (diff | hist) . . (+359) . . N DUV Stepper Waveguides Backup Presentations (Created page with "DUV Stepper Waveguides Backup: Media:DUV Stepper Waveguides_v5.pptx DUV Stepper Waveguides Backup: Media:DUV Stepper Waveguides_v4.pptx DUV Stepper Waveguides Backup: [[M...")
- 08:50, 29 August 2012 (diff | hist) . . (+40) . . DUV Stepper
- 11:36, 28 August 2012 (diff | hist) . . (0) . . N File:DUV Stepper Waveguides v5.pptx (current)
- 11:35, 28 August 2012 (diff | hist) . . (+73) . . DUV Stepper (→Presentations)
- 11:22, 28 August 2012 (diff | hist) . . (-85) . . DUV Stepper (→170C Bake)
- 10:46, 28 August 2012 (diff | hist) . . (+195) . . N File:8 28 DUV SOI 170C 1.zip (SOI wafer with matrix array. SEMs are named as E25_F-.15_HGRT, where 'E' stands for the energy in mJ/cm^2 and 'F' for the focus. Energy 25mJ/cm^2, Focus -.15 seems to be a good configuration.) (current)
- 10:39, 28 August 2012 (diff | hist) . . (+47) . . DUV Stepper (→170C Bake)
- 10:39, 28 August 2012 (diff | hist) . . (+38) . . DUV Stepper (→170C Bake)
- 10:20, 23 August 2012 (diff | hist) . . (+250) . . N File:8 23 DUV SOI 170C 1.zip (SOI wafer with matrix array. SEMs are named as E25_F-.15_HGRT, where 'E' stands for the energy in mJ/cm^2 and 'F' for the focus. It appears that the focus needs to be more negative than the current array. More SEMs are needed for conclusive proof.) (current)
- 10:17, 23 August 2012 (diff | hist) . . (+84) . . DUV Stepper
- 12:56, 22 August 2012 (diff | hist) . . (+214) . . N File:Post5and10minetchsu8.zip (Looks ok but hard to tell if completely gone. I still need to do the last 30 SiN etch. Measurements over large window was 2.51 um with resist, 2.40 um post 5 min etch (resist gone), 2.38 um post another 5 min etch.) (current)
- 12:56, 22 August 2012 (diff | hist) . . (+70) . . SWEEPER (→Characterization)
- 12:52, 22 August 2012 (diff | hist) . . (+71) . . N File:Via2Litho.zip (Notice the rounding at the top of the resist after the 10min 120C bake.) (current)
- 12:51, 22 August 2012 (diff | hist) . . (+44) . . SWEEPER (→Characterization)
- 12:45, 22 August 2012 (diff | hist) . . (+162) . . N File:NMetal Litho.zip (Pictures of NMetal litho. Note the shifted alignment (at this and previous layers) on the serpentine waveguides vs the equal alignment on the straight waveguides.) (current)
- 12:44, 22 August 2012 (diff | hist) . . (+61) . . SWEEPER (→Characterization)
- 12:39, 22 August 2012 (diff | hist) . . (+795) . . N File:Liftoff Results.zip (The test wafers with metal dep from yesterday ( 0.9 and 1.8 um resist) lifting off this morning with a pipet. Tey were soaked overnight in Acetone and no U/S. Still areas of large flaps but good enough to proceed with the dummy chip. The 0.9 um resist l) (current)
- 12:38, 22 August 2012 (diff | hist) . . (+63) . . SWEEPER (→Characterization)
- 10:13, 17 August 2012 (diff | hist) . . (0) . . N File:DUV Stepper Waveguides v4.pptx (current)
- 10:12, 17 August 2012 (diff | hist) . . (0) . . N File:DUV Stepper Waveguides v3.pptx (current)
- 10:11, 17 August 2012 (diff | hist) . . (0) . . N File:DUV Stepper Waveguides v2.pptx (current)
- 10:10, 17 August 2012 (diff | hist) . . (0) . . N File:DUV Stepper Waveguides v1.pptx (current)
- 10:05, 17 August 2012 (diff | hist) . . (+66) . . DUV Stepper (→Presentations)
- 09:00, 17 August 2012 (diff | hist) . . (+191) . . DUV Stepper
- 08:57, 17 August 2012 (diff | hist) . . (-3) . . DUV Stepper (→170C Bake)
- 08:56, 17 August 2012 (diff | hist) . . (-54) . . DUV Stepper (→170C Bake)
- 08:56, 17 August 2012 (diff | hist) . . (+3) . . DUV Stepper (→170C Bake)
- 08:56, 17 August 2012 (diff | hist) . . (+54) . . DUV Stepper (→170C Bake)
- 08:54, 17 August 2012 (diff | hist) . . (+93) . . N File:DUV si 170C 2.jpg (Microscope picture of the sample. Flood exposed before etch, developed after etch (AZ300MIF)) (current)
- 08:53, 17 August 2012 (diff | hist) . . (+6) . . DUV Stepper (→Presentations)
- 08:53, 17 August 2012 (diff | hist) . . (+2) . . DUV Stepper (→Presentations)
- 08:52, 17 August 2012 (diff | hist) . . (+1) . . File:DUV-si-170C-1.zip (current)
- 08:52, 17 August 2012 (diff | hist) . . (-2) . . File:DUV-si-170C-1.zip
- 08:52, 17 August 2012 (diff | hist) . . (+2) . . File:DUV-si-170C-1.zip
- 08:50, 17 August 2012 (diff | hist) . . (+117) . . N File:DUV-si-170C-1.zip (SEMs of sample after WG etch and PR strip -PE2 2min, 1165 soak 30min, 1165 U/S (high, freq5, int5) 10 min, PE2 2min)
- 08:47, 17 August 2012 (diff | hist) . . (+113) . . DUV Stepper (→Characterization)
- 08:44, 17 August 2012 (diff | hist) . . (-3) . . DUV Stepper (→Characterization)
- 08:44, 17 August 2012 (diff | hist) . . (+3) . . DUV Stepper (→Characterization)
- 08:43, 17 August 2012 (diff | hist) . . (-5) . . DUV Stepper (→Characterization)
- 08:43, 17 August 2012 (diff | hist) . . (-7) . . DUV Stepper (→Characterization)
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