Device Run
From OptoelectronicsWiki
- Please contribute your mask layout and process follower here.
- This page is used to help everyone get track of the mask sets and related process files.
- Note there are two tables
| Project | Name of mask set | Mask file | Mask Polarity and Coordinates | Process follower | Process illustration | Created by | date | Note | Status | Project page |
|---|---|---|---|---|---|---|---|---|---|---|
| SWEEPER | N/A | download | download | Jon | May, 2011 | In progress | SWEEPER; | |||
| PhASER | PhASER rev1 | download | N/A | download | download | Hui-Wen | JUN, 2008 | done | ||
| PhASER rev2 | download | download | download | download | Hui-Wen | AUG, 2009 | Spiral delay lines | done | PhASER; | |
| Mach-Zehnder modulator | MZM rev2 | download | download | download | download | Hui-Wen | APR, 2010 | slotline design rev2 | done | |
| High power MLL | HP-MLL rev1 | download | N/A | download | download | Mike | Dec 2010 | in progress | High-power MLL; | |
| AWG receiver | AWG receiver rev.1 | download | download | download | 2009 | in progress | AWG Receiver; | |||
| Super Lattice | download | download | download | Hui-Wen | Oct, 2009 | Superlattice |
| Run ID | wafer | mask | process flow | process follower | operator | logbook | results |
|---|---|---|---|---|---|---|---|
| SOIBuffer2R 1 | Summary of data. | ||||||
| SOIBuffer2R 2 | Grass during mesa etch. New batch started. | ||||||
| SOIBuffer2R 3 | Negative PR residue over III-V couldn't be cleaned off. Process follower adjusted. | ||||||
| SOIBuffer2R 4 | Process follower | Testing in progress | |||||
| #1727 W394 | Jared design | Lionix | 80-nm core | ||||
| #1727 W395 | Jared design | Lionix | 80-nm core | ||||
| Short Loop 2010 06 | SOIBuffer2R | Process follower | Geza | Testing in progress |
