File list
From OptoelectronicsWiki
This special page shows all uploaded files.
 Date |
Name | Thumbnail | Size | User | Description | Versions |
|---|---|---|---|---|---|---|
| 11:26, 8 June 2012 | 2012 06 08 Sweeper Summary.xlsx (file) |  |
373 KB | Peters | 1 | |
| 09:46, 8 June 2012 | 20120608 SF6 Silicon etch.pptx (file) | |
1.16 MB | Peters | 1 | |
| 13:59, 30 April 2012 | 2012 04 30 Panasonic ICP 2 Recipes.xls (file) | |
69 KB | Peters | 1 | |
| 11:39, 13 April 2012 | 2012 04 13 Processing Issues.pptx (file) | |
1.54 MB | Peters | RIE2 Mesa Etching Issues and 5510 Negative resist residue post develop | 1 |
| 11:19, 9 April 2012 | SWEEPER Actives Trav v17 2.xls (file) | |
59 KB | Peters | 1 | |
| 11:17, 9 April 2012 | SWEEPER Actives Trav v17 1.xlsx (file) | |
59 KB | Peters | Newer version without the highlights and with ICP etch of SiN Mesa hardmask | 2 |
| 11:10, 16 March 2012 | 2012 03 16 Processing Issues.pptx (file) | |
1.22 MB | Peters | 2 | |
| 13:27, 1 March 2012 | 2012 03 01 A2 and A3 Bond Lifting.pptx (file) | |
631 KB | Peters | Sweeper Run 2 Chips A2 and A3 at Gap Fill Litho. Summary of missing EPI and defects | 1 |
| 13:02, 1 March 2012 | 2012 03 01 Processing Issues.pptx (file) | |
1.93 MB | Peters | March 2012 Process Issues | 1 |
| 12:18, 18 January 2012 | Sweeper Anneal Recipe.xlsx (file) | |
15 KB | Peters | Sweeper 1050C Anneal Recipe and 360 Contact anneal recipe. | 1 |
| 13:40, 12 January 2012 | SWEEPER Actives Trav v14 4.xls (file) | |
91 KB | Peters | Added Gratings info and updated traveler | 4 |
| 14:20, 19 December 2011 | 2011 12 19 Sweep Run 2 Chips.xlsx (file) | |
10 KB | Peters | Summary of Sweeper Run 2 chips started in December 2011 | 1 |
| 10:36, 3 November 2011 | Bonding Issues.pptx (file) | |
1.72 MB | Peters | Typical bonding issues with III-V and SOI | 1 |
| 11:03, 10 May 2011 | 110202 Sweeper Rev1.1 Run 2B.xls (file) | |
68 KB | Peters | 1 | |
| 14:50, 2 May 2011 | SWEEPER process flow.pptx (file) | |
202 KB | Peters | Sweeper Process Flow | 1 |
| 14:48, 2 May 2011 | 110202 Sweeper Rev1 Batch 1.xls (file) | |
80 KB | Peters | Sweeper Process First Run | 1 |
| 10:46, 23 June 2010 | 100402 ICP-2 si etch calibration.xls (file) | |
1.23 MB | Peters | 4 |
